Contamination Calibration
Film Thickness
Dimensional Products
Contamination Calibration Products
Brief Introduction:
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VLSI Standards offers a range of contamination calibration products designed for Counter calibration or Scanning Surface Inspection Systems (SSIS) calibration standards.
These products serve various purposes, including calibrating instruments for specific particle sizes using Absolute Contamination Standards, or for reticles/pellicles using Reticle Contamination Standards. Additionally, VLSI Standards has developed specialized contamination calibration products that offer features such as reclean able surfaces, scanner diagnostics capability, and the ability to calibrate mask and pellicle inspection systems.
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Film Thickness Products
Brief Introduction:
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The Film Thickness Standards offered by VLSI Standards serve the purpose of calibrating optical thickness measurement instruments. These standards are comprised of silicon wafers that feature a uniform pattern of either thermally grown silicon dioxide or deposited silicon nitride on their surfaces.
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Dimensional Products
Brief Introduction:
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VLSI Standards provides a range of profilometry calibration and surface topography products. Profilometry calibration products offer versatility, as they are applicable in any scenario that requires the characterization of vertical height. On the other hand, surface topography products are specifically designed for dimensional calibration purposes.
Electrical Products
Solar Products
Recertification Services
Electrical Products
Brief Introduction:
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VLSI Standards has developed a diverse range of calibration products to effectively calibrate both non-contact and contact resistivity and sheet resistance measuring devices.
These products are equipped with calibrated values for resistivity and sheet resistance, ensuring accurate and reliable measurements.
Solar Products
Brief Introduction:
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VLSI Standards is a trusted supplier of traceable Calibration Standards to industries that prioritize measurement accuracy and instrument monitoring. Specializing in the semiconductor, data storage, flat panel display, and photovoltaic sectors, VLSI Standards designs and manufactures a comprehensive range of products.
These products are predominantly traceable and accredited to the ISO-17025 metrology laboratory standard, enabling customers to comply with national and international quality standards, including ISO 9000, TS16949, and the APLAC MRA.
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Recertification Services
VLSI Standards provides comprehensive recertification services to ensure the ongoing accuracy and reliability of your measurement instruments. With expertise in various industries, VLSI offers recertification for a wide range of calibration standards, including contamination calibration, film thickness, profilometry, resistivity, and sheet resistance standards.
By leveraging their experience and adherence to quality standards, VLSI helps organizations maintain the highest level of measurement accuracy and meet industry requirements.