Ultra High Purity Pumps
Mega 255
Max Flow: 255 LPM (67 GPM)
Max Temperature: 212 °F (100 °C)
Max Pressure: 100 PSIG (0.69 MPa)
Materials: PTFE/PFA fluid path
All wetted seals are PTFE
Certifications: CE
Applications: Semiconductor/Electronics
LED/Flat Panel, Chemical Processing,
Delivery
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Mega 120
Max Flow: 120 LPM (32 GPM)
Max Temperature: 212 °F (100 °C)
Max Pressure: 80 PSIG (0.55 MPa)
Materials: PTFE/PFA fluid path
All wetted seals are PTFE
Certifications: CE
Applications: Semiconductor/Electronics
LED/Flat Panel, Chemical Processing, Aerospace
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Mega 960
Max Flow: 95 LPM (25 GPM)
Max Temperature: 212 °F (100 °C)
Max Pressure: 80 PSIG (0.55 MPa)
Materials: PTFE/PFA fluid path
All wetted seals are PTFE
Certifications: CE
Applications: Semiconductor/Electronics
LED/Flat Panel, Chemical Processing, Delivery, Aerospace
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Rev 6
Max Flow: 76 LPM (20 GPM)
Max Temperature: 194 °F (90 °C)
Max Pressure: 116 PSIG (0.80 MPa) @ 25ºC
97 PSIG (0.67 MPa) @ 90ºC
Materials: PFA, PTFE
Certifications: CE
Applications: Process: Slurry
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Evolve 55
Max Flow: 57 LPM (15 GPM)
Max Temperature: 212 °F (100 °C)
Max Pressure: 100 PSIG (0.69 MPa)
Materials: PTFE/PFA fluid path
Perlast™ or PTFE fluid port adapter seals
Certifications: CE
Applications: Semiconductor/Electronics
LED/Flat PanelChemical, Chemical, Processing, Delivery, Process, Slurry, Aerospace
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Maxim 50
Max Flow: 49 LPM (13 GPM)
Max Temperature: 356 °F (180 °C)
212 °F (100 °C)*Model M50D
Max Pressure: 80 PSIG (0.55 MPa)
60 PSIG (0.41 MPa)* Model M50R
Materials: PTFE/PFA fluid path
Certifications: CE
Applications: Semiconductor/Electronics
LED/Flat Panel, Chemical Processing, Delivery, Aerospace
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Magnum 620
Max Flow: 42 LPM (11 GPM)
39 LPM (10 GPM)* Model 620D
Max Temperature: 230 °F (110 °C)
212 °F (100 °C) - 620D
Max Pressure: 80 PSIG (0.55 MPa)
Materials: PTFE/PFA fluid path
Certifications: CE
Applications: Semiconductor/Electronics
LED/Flat Panel, Chemical Processing, Aerospace
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Magnum 610
Max Flow: 36 LPM (10 GPM)
Max Temperature: 212 °F (100 °C)
Max Pressure: 60 PSIG (0.41 MPa)
Materials: PTFE/PFA fluid path
Viton® (FKM) or FFKM air side seals
PTFE wetted seals
Certifications: CE
Applications: Semiconductor/Electronics
LED/Flat Panel, Chemical Processing, Delivery, Aerospace
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T25
Max Flow: 25 LPM (7 GPM)
Max Temperature: 212 °F (100 °C)
Max Pressure: 100 PSIG (0.69 MPa)
Materials: Virgin PTFE/PFA fluid path
Certifications: CE
Applications: Semiconductor/Electronics
Chemical, Chemical Processing, Delivery, Slurry
(Click image for more info
Max Flow: 21 LPM (6 GPM)
Max Temperature: 212 °F (100 °C)
Max Pressure: 60 PSIG (0.41 MPa)
Materials: PTFE/PFA fluid path
Viton® (FKM) air side seals
Certifications: CE
Applications: Semiconductor/Electronics, LED/Flat Panel, Chemical Processing, Aerospace
Max Flow: 20 LPM (5 GPM)
Max Temperature: 248 °F (120 °C)
Max Pressure: 80 PSIG (0.55 MPa)
Materials: PTFE/PFA fluid path
Certifications: CE
Applications: Semiconductor/Electronics
LED/Flat Panel, Chemical, Chemical Processing, Slurry, Aerospace
(Click image for more info)
Accessories
Model SS95
Max Flow: 95 LPM (25 GPM)
Max Temperature: 356 °F (180 °C)
Max Pressure: 80 PSIG (0.55 MPa)
Certifications: CE
(Click image for details)
Model SS85
Max Flow: 100 LPM (26 GPM)
Max Temperature: 356 °F (180 °C)
Certifications: CE
(Click image for details)
Pump Tool Kits
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PC7 Pump Controller
Materials: PFA or PP
Certifications: CE
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End-of-Stroke
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Cycle Probe
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External Leak Probe
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