Otsuka

Model

Optical Thickness Meter

Features

Highly accurate Absolute Reflectance Measurement enables precise analysis of Film Thickness and Optical Constants. An optical system which realizes measurement with a wide wavelength range (UV to NIR) using microscopy.

Model

Wavelength Range

Film Thickness Range

Samples Sizes

Spot Sizes

Measurement Time

Machine Dimension

Body (W-556 x D-556 x H-618)mm

Max. 200mm x 200mm x 17mm

Dia. 10um

1sec / 1 point

230~800nm

360~1100nm

900~1600nm

1nm~35um

7nm~49um

16nm~92um

OPTM-A1

OPTM-A2

OPTM-A3